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专利名称：Refractory coatings
发明人：William A. Brainard,Donald R. Wheeler申请号：US06/191746申请日：19800929公开号：US04341843A公开日：19820727
摘要：This invention is concerned with improving adhesion, friction and wear
properties of sputtered refractory coatings on substrates of materials that form stablenitrides.
Each substrate (10) is placed directly below a titanium carbide target (16) of acommercial radiofrequency diode apparatus (14) in a vacuum chamber (26). Nitrogen isbled into the system through a nozzle (3) resulting in a small partial pressure of about0.5% to 2.5% during the first two minutes of deposition. The flow of nitrogen is thenstopped, and the sputtering ambient is reduced to pure argon through a nozzle (28)without interrupting the sputtering process.
When nitrogen is deliberately introduced during the crucial interface formation, someof the titanium at the interface reacts to form titanium nitride while the metal of thesubstrate also forms the nitride. These two nitrides atomically mixed together in theinterfacial region (38) act to more strongly bond the growing titanium carbide coating(12) as it forms on the substrate (10).
申请人：THE UNITED STATES OF AMERICA AS REPRESENTED BY THE ADMINISTRATOROF THE NATIONAL AERONAUTICS AND SPACE ADMINISTRATION
代理人：N. T. Musial,J. R. Manning,Gene E. Shook
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