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专利名称：Apparatus for measuring two-dimensional
displacement
发明人：Ching-Fen Kao,Chung-Chu Chang,Ching-Fang
Lin
申请号：US10935172申请日：20040908
公开号：US20050062981A1公开日：20050324
专利附图：
摘要：An apparatus for measuring a two-dimensional displacement is disclosed andincludes a laser light source, a collimator lens, a beam splitter, a plurality of staggered
conjugate optic lens and a plurality of interference optical dephasing modules. The laserlight source provides a laser light incident on the collimator lens to generate collimatedlaser beams. Each of the collimated laser beams are incident on the beam splitter to beseparated into two incident beams and incident on a two-dimensional diffraction unit togenerate a plurality of first diffracted beams and a plurality of second-order diffractedbeams. The staggered conjugate optic lens are used to reflect the first diffracted beamsso that the first diffracted beams return to the two-dimensional diffraction unit togenerate a plurality of second diffracted beams where the second diffracted beams andthe second-order diffracted beams generated as a result of the first diffraction of thebeams stagger.
申请人：Ching-Fen Kao,Chung-Chu Chang,Ching-Fang Lin
地址：Hsinchu City TW,Hsinchu City TW,Changhua City TW
国籍：TW,TW,TW
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