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专利名称：MEMS structure and method of fabricating
the same
发明人：Young-tack Hong,Jong-seok Kim,In-sang
Song,Sang-wook Kwon,Seung-jin Oh,Eun-sung Lee,Seung-tae Choi
申请号：US115829申请日：20061019公开号：US079672B2公开日：20100119
专利附图：
摘要：A MEMS structure includes an element substrate, an electrode pad formed on
the element substrate, a MEMS activated element formed on the element substrate, andhaving an electrode-connecting layer, and a connecting line to electrically connect theelectrode pad and the electrode-connecting layer.
申请人：Young-tack Hong,Jong-seok Kim,In-sang Song,Sang-wook Kwon,Seung-jinOh,Eun-sung Lee,Seung-tae Choi
地址：Suwon-si KR,Hwaseong-si KR,Seoul KR,Seongnam-si KR,Daejeon KR,DaejeonKR,Daejeon KR
国籍：KR,KR,KR,KR,KR,KR,KR
代理机构：Sughrue Mion, PLLC
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