专利内容由知识产权出版社提供
专利名称：MULTILAYER THIN FILMS EXHIBITING
PERPENDICULAR MAGNETIC ANISOTROPY
发明人：Young Keun Kim,Yong Jin Kim申请号：US15599259申请日：20170518
公开号：US20180166627A1公开日：20180614
专利附图：
摘要：A method for forming a multilayer thin film exhibiting perpendicular magneticanisotropy includes alternately sputtering a CoFeSiB target and a Pd target inside avacuum chamber to form a [CoFeSiB/Pd] multilayer thin film on a substrate disposed
inside the vacuum chamber. The number of times the [CoFeSiB/Pd] multilayer thin film isstacked may be 3 or more.
申请人：KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
地址：Seoul KR
国籍：KR
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