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专利名称：Calibration method and apparatus发明人：Patricius Aloysius Jacobus
Tinnemans,Henricus Petrus Maria
Pellemans,Gerbrand Van Der Zouw,WillemMarie Julia Marcel Coene
申请号：US12973248申请日：20101220公开号：US08553218B2公开日：20131008
专利附图：
摘要：Calibration of an angularly resolved scatterometer is performed by measuring a
target in two or more different arrangements. The different arrangements causeradiation being measured in an outgoing direction to be different combinations ofradiation illuminating the target from ingoing directions. A reference mirrormeasurement may also be performed. The measurements and modeling of thedifference between the first and second arrangements is used to estimate separatelyproperties of the ingoing and outgoing optical systems. The modeling may account forsymmetry of the respective periodic target. The modeling typically accounts for
polarizing effects of the ingoing optical elements, the outgoing optical elements and therespective periodic target. The polarizing effects may be described in the modeling byJones calculus or Mueller calculus. The modeling may include a parameterization in termsof basis functions such as Zernike polynomials.
申请人：Patricius Aloysius Jacobus Tinnemans,Henricus Petrus MariaPellemans,Gerbrand Van Der Zouw,Willem Marie Julia Marcel Coene
地址：Hapert NL,Veldhoven NL,Eindhoven NL,Geldrop NL
国籍：NL,NL,NL,NL
代理机构：Sterne, Kessler, Goldstein & Fox P.L.L.C.
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