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专利名称:SILICA GLASS CRUCIBLE AND METHOD FOR
PRODUCING MONOCRYSTALLINE SILICONUSING SAME
发明人:SUDO, TOSHIAKI,SATO,
TADAHIRO,KITAHARA, ERIKO,FUJITA,TAKESHI
申请号:EP12861496申请日:20121031公开号:EP2799596A4公开日:20151216
摘要:Buckling of a vitreous silica crucible or fall of a sidewall into the crucible iseffectively suppressed. Furthermore, dislocations in a silicon single crystal are
suppressed to enhance the yield of the single crystal. The vitreous silica crucible is usedto pull single-crystal silicon and includes the cylindrical sidewall having an upward-opening rim, a mortar-shaped bottom including a curve, and a round portion connectingthe sidewall and the bottom. The round portion is provided in such a manner that thecurvature of the inner surface thereof is gradually increased from the sidewall toward thebottom in a section passing through the rotation axis of the vitreous silica crucible.
申请人:SUMCO CORPORATION
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