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SILICA GLASS CRUCIBLE AND METHOD FOR PRODUCING MON

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专利内容由知识产权出版社提供

专利名称:SILICA GLASS CRUCIBLE AND METHOD FOR

PRODUCING MONOCRYSTALLINE SILICONUSING SAME

发明人:SUDO, TOSHIAKI,SATO,

TADAHIRO,KITAHARA, ERIKO,FUJITA,TAKESHI

申请号:EP12861496申请日:20121031公开号:EP2799596A4公开日:20151216

摘要:Buckling of a vitreous silica crucible or fall of a sidewall into the crucible iseffectively suppressed. Furthermore, dislocations in a silicon single crystal are

suppressed to enhance the yield of the single crystal. The vitreous silica crucible is usedto pull single-crystal silicon and includes the cylindrical sidewall having an upward-opening rim, a mortar-shaped bottom including a curve, and a round portion connectingthe sidewall and the bottom. The round portion is provided in such a manner that thecurvature of the inner surface thereof is gradually increased from the sidewall toward thebottom in a section passing through the rotation axis of the vitreous silica crucible.

申请人:SUMCO CORPORATION

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