Wafer carrier positioning structure

专利名称：Wafer carrier positioning structure发明人：Takuji Nakatogawa申请号：US11812614申请日：20070620公开号：US07703609B2公开日：20100427

专利附图：

摘要：A wafer carrier positioning structure including a carrier body having a bottomface and a frame body provided in a peripheral part of the bottom face to projectdownwardly, for housing a wafer therein so that the wafer is parallel to the bottom face.Further, the wafer positioning structure includes a guide member detachably attached to

the bottom face of the carrier body, a guide groove provided in the guide member, forengaging with a positioning pin projecting from a mounting face upon mounting thecarrier body to the mounting face, so as to guide the carrier body to a regular mountingposition, and a locking portion provided in the guide member, locking to an inside face ofthe frame body while elastically having contact with the inside face.

申请人：Takuji Nakatogawa

地址：Ichihara JP

国籍：JP

代理机构：Wenderoth, Lind & Ponack, L.L.P.

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