专利内容由知识产权出版社提供
专利名称：Physical quantity sensor and method for
manufacturing the same
发明人：Minekazu Sakai,Kiyomasa Sugimoto申请号：US15022954申请日：20140923公开号：US10338092B2公开日：20190702
专利附图：
摘要：In a physical quantity sensor, a contact part that is directly and electricallyconnected to an external circuit is formed in a support substrate, and the supportsubstrate is maintained at a predetermined potential through the contact part. With this
configuration, the support substrate is maintained at the predetermined potentialwithout disposing an electrode in the interior of the semiconductor layer. For thatreason, a processing precision can be restrained from being reduced in forming themovable electrode, and hence a detection precision can be restrained from beingreduced.
申请人：DENSO CORPORATION
地址：Kariya, Aichi-pref. JP
国籍：JP
代理机构：Posz Law Group, PLC
更多信息请下载全文后查看
